The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 21, 1997
Filed:
Oct. 11, 1995
Applicant:
Inventors:
Wen-Kuang Tai, Kau-Hsiung, TW;
Ching-Li Shih, Hsin-Chu, TW;
Assignee:
United Microelectronics Corp., Taipei, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
118715 ; 1187 / ; 1184 / ;
Abstract
The invention disclosed an efficient apparatus for solving the problem of unstable growth rate of oxide occurred when the procedure of wet oxidation is processed first and immediately followed by a procedure of dry oxidation. The invention involves in implementing as many insulating sleeves as required for wrapping around inlet pipes of a horizontal driven field oxidation tube to prevent water vapor from remaining in the inlet pipes so as to stabilize the growth rate of oxide.
Quick Actions:
Tai, Wen-Kuang. (1997). Apparatus for preventing the unstable growth rate of oxide caused by (U.S. Patent No. 5595605). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5595605
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile