The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 1997
Filed:
Dec. 06, 1995
Hisashi Nakajima, Yamanashi-ken, JP;
Tokyo Electron Limited, Tokyo, JP;
Tokyo Electron Yamanashi Limited, Nirasaki, JP;
Abstract
A testing apparatus has a probe card having a plurality of first contact elements to be put in contact with an object to be tested, and a plurality of electrodes electrically connected with the first contact elements, a test head to be shifted between a retreat position and a test position, for performing electrical measurement of the object in the test position, a cylindrical connection unit, having a plurality of second contact elements to be put in contact with the electrodes of the probe card in the test position, for electrically connecting the probe card with the test head, the connection member being movably supported by the test head, a head plate for supporting the probe card, a driving mechanism for moving the probe card between a test position near the head plate and a wait position away from the head plate, and a movement limiting member for limiting movement of the connection member towards the test head and applying a pressing force to the connection member and the probe card via the second contact portions in cooperation with the driving mechanism, when the probe card is shifted from the wait position to the test position by the driving mechanism.