The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 14, 1997

Filed:

Jun. 07, 1995
Applicant:
Inventor:

Ken K Lee, Los Altos, CA (US);

Assignee:

Ultrapointe Corporation, San Jose, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J / ;
U.S. Cl.
CPC ...
2502013 ; 250216 ; 359368 ; 359813 ;
Abstract

A method is described for obtaining an image of a target surface with a confocal microscope. The surface to be imaged is represented by a number of points on the surface, each of which has a unique location represented by X, Y, and Z Cartesian coordinates. The microscope selects a starting position for an objective lens of the microscope along a Z vector substantially normal to the surface. The objective lens has a preselected range of travel along the Z vector that is divided into a number of Z positions. Next, the objective lens is positioned and the surface scanned at each of the Z positions. The scan at each Z position provides signals, one for each point on the surface, representing the reflected intensity of laser light. Then, for each point on the surface, the microscope finds the Z coordinate of the point by determining which Z position resulted in the greatest return intensity of reflected laser light. From this information the Z coordinate of any particular point may be determined because the maximum reflected intensity for a given point, when correlated to the Z position of the objective lens, gives the Z location of that point on the surface. Having determined the Z locations for each point on the surface, the Z locations are compared to determine the low and high points on the surface. A second scan is then set up using the low and high points on the surface to determine the optimal scan parameters.


Find Patent Forward Citations

Loading…