The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 1997
Filed:
Jun. 20, 1995
Hitachi, Ltd., Tokyo, JP;
Hitachi Science Systems, Ltd., Hitachinaka, JP;
Abstract
In a eucentric side entry goniometer stage used in an electron microscope controlled in five-axes of specimen positions (x, y, z) and specimen tilt angles (.theta..sub.x, .theta..sub.y), image shifting during tilting a specimen is automatically corrected. Assuming that the coordinates of an observed point are (x, y, z), shifting of observed image is automatically corrected by calculating correction values of image shifting .DELTA.y and .DELTA.z using a calculator based on the following equations and by shifting the observed point to a coordinates (x, y-.DELTA.y, z-.DELTA.z) using a specimen position and tilt angle controller when the tilt angle .theta..sub.y is varied from .theta..sub.y1 to .theta..sub.y2 wherein