The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 19, 1996

Filed:

Nov. 18, 1992
Applicant:
Inventors:

Adrian I Cogan, San Jose, CA (US);

Richard A Blanchard, Los Altos, CA (US);

Assignee:

Siliconix Incorporated, Santa Clara, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437203 ; 437 40 ; 437979 ;
Abstract

A transistor constructed in accordance with our invention includes an N+ substrate, an N- region formed on the N+ substrate, a P- body region formed on the N- region, and an N+ source region formed on the P- body region. A vertical groove extends through the N+, P- and N- regions, and an insulating layer is formed on the groove walls. A polysilicon gate is formed inside the groove. Of importance, the portion of the insulating layer between the polysilicon and the N+ region and the insulating layer between the polysilicon and the N+ substrate is thicker than the portion of the insulating layer between the polysilicon gate and the P- body region. Because of the enhanced thickness of the portions of the .insulating layer between the gate and N+ substrate, the transistor constructed in accordance with our invention is less susceptible to premature field induced breakdown.


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