The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 1996
Filed:
Jun. 07, 1995
Fredric D Bailey, Golden, CO (US);
Douglas A Buchanan, Cortlandt Manor, NY (US);
Alessandro C Callegari, Yorktown Heights, NY (US);
Howard M Clearfield, Yorktown Heights, NY (US);
Fuad E Doany, Katonah, NY (US);
Donis G Flagello, Ridgefield, CT (US);
Harold J Hovel, Katonah, NY (US);
Douglas C Latulipe, Jr, Danbury, CT (US);
Naftali E Lustig, Croton-on-Hudson, NY (US);
Andrew T Pomerene, New Fairfield, CT (US);
Sampath Purushothaman, Yorktown Heights, NY (US);
Christopher M Scherpereel, Poughquag, NY (US);
David E Seeger, Congers, NY (US);
Jane M Shaw, Ridgefield, CT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
The present invention relates to an improved method of depositing a diamond-like carbon film onto a substrate by low temperature plasma-enhanced chemical vapor deposition (PECVD) from a hydrocarbon/helium plasma. More specifically, the diamond-like carbon films of the present invention are deposited onto the substrate by employing acetylene which is heavily diluted with helium as the plasma gas. The films formed using the process of the present invention are characterized as being amorphous and having dielectric strengths comparable to those normally observed for diamond films. More importantly, however is that the films produced herein are thermally stable, optically transparent, absorbent in the ultraviolet range and hard thus making them extremely desirable for a wide variety of applications.