The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 1996
Filed:
Mar. 03, 1995
NEC Corporation, Tokyo, JP;
Abstract
A dynamic fault analyzing system discontinuously radiates an electron beam onto a semiconductor integrated circuit device applied with a test pattern for monitoring a secondary electron beam produced in the semiconductor integrated circuit device, and the intensity of the secondary electron beam is varied depending upon combination of voltage level and topography of a wiring pattern incorporated in the semiconductor integrated circuit device, wherein a fault is detectable from discrepancy between variation of the secondary electron beam produced in a defective product and variation of the secondary electron beam produced in an excellent product; however, the variation of the secondary electron beam contains topographic information, and the failure origin is easily specified on an image produced on the basis of the topographic information.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile