The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 1996
Filed:
Feb. 16, 1994
Applicant:
Inventor:
Tetsu Ohsawa, Sagamihara, JP;
Assignees:
Tokyo Electron Limited, Tokyo, JP;
Tokyo Electron Tohoku Limited, Esashi, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N / ; G01N / ;
U.S. Cl.
CPC ...
73629 ; 73634 ; 734321 ; 367 93 ; 367 97 ; 367105 ; 437247 ;
Abstract
A transfer device an ultrasonic sensor having an oscillating section for oscillating an ultrasonic beam toward wafers which are horizontally arranged in a carrier and a receiving section for receiving a reflected ultrasonic wave, and driving mechanism for vertically moving the ultrasonic sensor relative to the carrier so as to sequentially radiate an ultrasonic beam to the end faces of the wafers. The presence/absence of a wafer and projection of the wafer in and from the carrier are detected based on the reflected wave received by the receiving section.