The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 18, 1996
Filed:
May. 08, 1995
Hansjoerg Bochum, Stuttgart, DE;
Rolf Nowack, Leonberg, DE;
Hans Opower, Krailling, DE;
Wolfram Schock, Boeblingen, DE;
Klaus Wessel, Stuttgart, DE;
Abstract
In order to produce a gas discharge structure for two-dimensionally extending gas discharges comprising a pair of electrodes including a first and a second electrode which have mutually facing electrode surfaces, a gas discharge space arranged between the electrode surfaces with a plasma gas provided therein and a high frequency source with which a current can be fed into the pair of electrodes for producing a plasma between the first and the second electrode, in such a way that wavelength dependent modulations of the field strength substantially no longer occur in the gas discharge space, it be proposed that, the electrode surface of the first electrode is divided into two partial electrode surfaces that are located adjacent to one another in this electrode surface but are electrically separated from one another, that the partial electrode surfaces have mutually facing edge regions which extend at a defined distance from one another, that the partial electrode surfaces be connected to two terminals of the high frequency source which are at different potentials in such a way that a surface current flows over one of the edge regions to and then over the other one and that the second electrode be at an intermediate potential which lies between that of the two partial electrodes.