The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 28, 1996

Filed:

Jun. 14, 1994
Applicant:
Inventors:

Teruyuki Kagami, Hitachioota, JP;

Sakae Yaita, Katsuta, JP;

Niro Katane, Hitachioota, JP;

Mitsuo Tanabe, Hitachioota, JP;

Yoshinori Nakayama, Sayama, JP;

Hidetoshi Satoh, Hachiouji, JP;

Assignee:

Hitachi, Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B44C / ; C25F / ;
U.S. Cl.
CPC ...
216 12 ; 1566301 ; 1566441 ; 216-2 ; 216 56 ; 428131 ; 430-5 ; 437225 ;
Abstract

A semiconductor substrate has a plurality of chip portions and chip separating portions for partitioning the plurality of chip portions into each other. The plurality of chip portions and the separating portions are etched on one side of the semiconductor substrate so that each of the plurality of chip portions is provided with stencil patterns. Furthermore, the plurality of chip portions and chip separating portions are etched on the other side of the semiconductor substrate so that the stencil patterns are exposed and the plurality of chip portions are capable of being substantially separated from each other.


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