The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 1996
Filed:
Nov. 09, 1994
Applicant:
Inventors:
Martin Schlott, Hanau, DE;
Martin Kutzner, Neuberg, DE;
Martin Weigert, Hanau, DE;
Uwe Konietzka, Geiselbach, DE;
Bruce Gehman, Morgan Hill, CA (US);
Shawn Vahlstrom, Morgan Hill, CA (US);
Assignee:
Leybold Materials, Hanau, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ; C04B / ;
U.S. Cl.
CPC ...
20429813 ; 20419229 ; 501134 ; 264 65 ;
Abstract
A target for production of transparent electrically conductive layers by cathode sputtering is produced from indium oxide-tin oxide powder mixtures or coprecipitated indium oxide-tin oxide powders. A target with especially high mechanical strength consists of an oxide ceramic material into which metallic phase components have been incorporated in a uniform and finely distributed manner and which has a density of more than 96% of the theoretical density of indium oxide/tin oxide consisting purely of oxide.