The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 02, 1995
Filed:
Dec. 02, 1993
Hideo Todokoro, Tokyo, JP;
Kenji Takamoto, Ome, JP;
Tadashi Otaka, Katsuta, JP;
Fumio Mizuno, Tokorozawa, JP;
Satoru Yamada, Ome, JP;
Katsuhiro Kuroda, Hachioji, JP;
Ken Ninomiya, Higashimatsuyama, JP;
Tokuo Kure, Tokyo, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
A technique for displaying a scanned specimen image permits non-destructive observation of a surface structure having large or precipitous unevenness, an internal structure of a specimen or a specific structure of a defect or foreign matter, which non-destructive observation has hitherto been considered to be difficult to achieve. The technique can be applied to inspection and measurement so as to economically provide devices and parts of high quality and high reliability. Thus, secondary information such as secondary electrons resulting from interaction of primary information with a specimen, the primary information being generated as a result of interaction of a scanning electron beam with the specimen, is utilized as an image signal to form an image.