The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 25, 1995

Filed:

Sep. 28, 1993
Applicant:
Inventors:

Hitoshi Seki, Sendai, JP;

Satoshi Miyazawa, Miyagi, JP;

Tadahiro Ohmi, Sendai, JP;

Kazuko Ogino, Sendai, JP;

Akira Abe, Sendai, JP;

Tsutomu Nakamura, Sendai, JP;

Hirofumi Fukui, Miyagi, JP;

Yasuhiko Kasama, Sendai, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B05D / ;
U.S. Cl.
CPC ...
156662 ; 252 793 ; 134-3 ;
Abstract

An etchant which generates neither heat nor gas during the process, does not sublimate, is stable for a long period of time, requires no special pipings, and further requires no special treatment of waste water because of containing no organic solvents. The etchant is a solution containing hydrofluoric acid and an-oxoacid or oxoacid salt compound expressed by Mm(XOn)p (where M is hydrogen, one-to three-valence metal or NH.sub.4, m is 1 or 5, X is a halogen element, n is 3, 4 or 6, and p is 1, 2 or 3).


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