The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 28, 1995

Filed:

Nov. 24, 1992
Applicant:
Inventor:

Erhard Kohn, Titusville, NJ (US);

Assignee:

Siemens Corporate Research, Inc., Princeton, NJ (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
257 12 ; 257191 ; 257194 ;
Abstract

A high electron mobility transistor includes a donor layer of aluminum gallium arsenide (AlGaAs) for forming a two-dimensional electron gas (2DEG) in a proximate buffer layer of gallium arsenide. The donor layer has a composition profile including a relatively high concentration of aluminum over a first thickness portion proximate the buffer layer, a low and constant concentration of aluminum over a second thickness portion distal from the buffer layer and a graded concentration of aluminum in a third thickness portion of the donor layer between the first and second thickness portions, transitioning between the high and the low concentrations of aluminum. The donor layer has a doping profile including a high level doping spike in the first thickness portion and a low doping level over the second and third thickness portions.


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