The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 21, 1995

Filed:

Oct. 12, 1993
Applicant:
Inventors:

Yu-Wu Zhang, Kawasaki, JP;

Masanobu Kataoka, Kure, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
73105 ; 324 7628 ;
Abstract

There are provided a pickup for scanning a surface of an object to be measured and for outputting an electric signal corresponding an unfiltered profile curve; and a low-pass filter for extracting low-frequency components corresponding to a waviness profile curve from the electric signal output from the pickup. The low-pass filter comprises two cascade-connected filters expressed by transfer function G(s) having adjusting coefficient .zeta. which ranges from 0.7134 to 1.1083:


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