The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 20, 1994
Filed:
Dec. 29, 1992
Applicant:
Inventors:
Thomas J Lynch, North Easton, MA (US);
Chester J Sobodacha, Coventry, RI (US);
Dana L Durham, East Greenwich, RI (US);
Assignee:
Hoechst Celanese Corporation, Somerville, NJ (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C08G / ;
U.S. Cl.
CPC ...
525501 ; 430192 ;
Abstract
The present invention relates to a water insoluble. aqueous alkali soluble novolak resin blend, wherein the resin blend comprises two novolaks having dissimilar relative molecular weights and similar dissolution rates, a process for producing such a resin blend, a photoresist containing such a resin blend and a method for producing a semi-conductor device utilizing such a photoresist.
Lynch, Thomas. (1994). Novolak resin blends for photoresist applications (U.S. Patent No. 5374693). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5374693
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile