The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 1994
Filed:
Jun. 10, 1993
Applicant:
Inventors:
Robert J Heideman, Galveston, IN (US);
Randy A Rusch, Kokomo, IN (US);
Michael S Baird, Kokomo, IN (US);
Assignee:
Delco Electronics Corporation, Kokomo, IN (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ; H01L / ; H01L / ;
U.S. Cl.
CPC ...
257651 ; 257768 ; 257770 ; 257763 ; 257767 ;
Abstract
A semiconductor device aluminum-containing metallization system that is particularly useful for integrated circuits (ICs) having P-type contact regions and also having a likelihood of extended exposure to elevated temperatures. Use of an aluminum/silicon diffusion barrier formed of an amorphous tungsten/silicon on such ICs is made commercially practical. A titanium or transition metal silicide layer is disposed beneath the amorphous tungsten/silicon layer, to consistently provide durable low resistance electrical contacts to P-type regions of the IC.