The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 1994
Filed:
Oct. 01, 1991
Applicant:
Inventors:
John Woods, Dublin, IE;
Pauline Coakley, Kilkenny, IE;
Assignee:
Loctite Ireland, Ltd., Dublin, IE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07F / ; C07F / ;
U.S. Cl.
CPC ...
556 52 ; 556 55 ; 556 56 ; 556415 ; 556416 ; 556417 ; 556428 ; 556432 ; 556436 ; 556437 ; 556438 ; 556439 ; 556440 ; 556441 ; 556442 ; 526298 ;
Abstract
Anionically polymerizable monomers containing at least one silicon or titanium atom form polymeric photoresists having good dry etch resistance for use in microlithography. The monomers are of the formula ##STR1## wherein A is --H or --CH.dbd.CH.sub.2 ; X is a strong electron withdrawing group;