The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 09, 1994

Filed:

Oct. 20, 1992
Applicant:
Inventors:

Harald Rose, Darmstadt, DE;

Ralf Degenhardt, Offenbach, DE;

Karel D Van der Mast, Eindhoven, NL;

Assignee:

U.S. Philips Corporation, New York, NY (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250305 ; 250311 ;
Abstract

An electron beam apparatus is provided with an energy selective device which enables spectrometric measurements together with imaging. The energy selective device has its main electron beam trajectory in a plane outside the optical axis of the electron beam apparatus, thereby substantially reducing the overall length of the apparatus. Preferably the energy selective device has double symmetry such that the energy dispersion has a maximum value in a central plane of symmetry where a selective slit can be introduced. Full symmetry facilitates full compensation of optical aberrations in the device. Adding quadruples in a second plane of symmetry enables imaging of spectra at a location outside the device.


Find Patent Forward Citations

Loading…