The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 1994
Filed:
Nov. 22, 1991
Nicholas J Clecak, San Jose, CA (US);
Willard E Conley, Cornwall, NY (US);
Ranee W-L. Kwong, Wappings Falls, NY (US);
Leo L Linehan, Walden, NY (US);
Scott A MacDonald, San Jose, CA (US);
Harbans S Sachdev, Hopewell Junction, NY (US);
Hubert Schlosser, Glashutten, DE;
Carlton G Willson, San Jose, CA (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
Dry developable top surface imageable photoresist compositions which comprise, in admixture, a film-forming aromatic polymer resin activated to electrophilic substitution, an acid catalyzable agent capable of being inserted into the aromatic polymer resin, and a radiation degradable acid generating compound and processes for generating positive tone resist images on substrates therewith.