The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 1994
Filed:
Feb. 12, 1993
Akira Ishii, Amagasaki, JP;
Syoichiro Minomo, Takatsuki, JP;
Michio Taniguchi, Kobe, JP;
Masato Sugiyo, Izumi, JP;
Daihen Corporation, , JP;
Abstract
In a plasma processing apparatus including a plasma chamber having a strip-shaped rectangular window having a longitudinal length formed in a side wall of the plasma chamber, an object to be processed is provided within the plasma chamber so as to be close to the window. The plasma processing apparatus includes a coupling rectangular waveguide having a strip-shaped rectangular slit formed in an E-plane thereof so as to extend in a direction of an axis thereof, wherein the coupling rectangular waveguide is provided so that the direction of the axis of the coupling rectangular waveguide is parallel to the longitudinal direction of the window of the plasma chamber. A coupling member made of a material for propagating a microwave is mounted between the slit of the coupling rectangular waveguide and the window of the plasma chamber, and electromagnetically couples the slit with the window in an airtight state. Further, a microwave generating unit is connected to the coupling rectangular waveguide to generate and supply a microwave into the coupling rectangular waveguide, thereby propagating the microwave through the slit of the coupling rectangular waveguide, the coupling member and the window of the plasma chamber into the plasma chamber.