The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 1994
Filed:
Jan. 15, 1993
Panayotis Andricacos, Croton-on-Hudson, NY (US);
Moritz Branger, Los Altos, CA (US);
Robert M Browne, San Jose, CA (US);
John O Dukovic, Pleasantville, NY (US);
Benjamin W Fu, Cupertino, CA (US);
Robert W Hitzfeld, San Jose, CA (US);
Matteo Flotta, Mahopac, NY (US);
Donald R McKenna, San Jose, CA (US);
Lubomyr T Romankiw, Briarcliff Manor, NY (US);
Saeed Sahami, San Jose, CA (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A multi-compartment electroplating system for electroplating two or more objects simultaneously such that the electrodeposited material is substantially uniform in thickness and composition. Electroplating solution is circulated between a reservoir and a multi-compartment tank which has one cathode-paddle-anode (CPA) assembly for each compartment. Each CPA assembly has an anode, a cathode adapted for holding a wafer and employing a single thieving electrode which covers all of the floor of the compartment not covered by the wafer, and a paddle. Also included is a cover which houses a single linear motor for driving all of the paddles in synchrony.