The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 1994
Filed:
Jun. 26, 1992
Applicant:
Inventors:
Tsuyoshi Wakabayashi, Tokyo, JP;
Takenobu Matsuo, Tokyo, JP;
Shuji Moriya, Tokyo, JP;
Hidenobu Arimitsu, Kanagawa, JP;
Assignees:
Tokyo Electron Limited, Tokyo, JP;
Ebara Research Co., Ltd., Fujisawa, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
156345 ; 156626 ; 156627 ; 118712 ; 118715 ; 118724 ; 20429803 ; 20429832 ;
Abstract
A gas measuring device includes a dissolving unit for dissolving gas to be measured in solvent medium, a measuring unit for measuring the amount of ions generated when the gas to be measured is ionized in the liquid medium, and a calculating unit for calculating the amount of the gas to be measured from a value measured by the measuring unit.
Wakabayashi, Tsuyoshi. (1994). Gas measuring device and processing apparatus provided with the gas (U.S. Patent No. 5294280). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5294280
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile