The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 1994
Filed:
Apr. 17, 1992
Applicant:
Inventors:
Jun Tomioka, Takarazuka, JP;
Koji Kuwana, Fujiidera, JP;
Hirotoshi Nakanishi, Osaka, JP;
Hiroshi Takagaki, Higashiosaka, JP;
Yasunori Doi, Takatsuki, JP;
Yasunori Uetani, Toyonaka, JP;
Ryotaro Hanawa, Ibaraki, JP;
Assignee:
Sumitomo Chemical Company, Limited, Osaka, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C07C / ; G03F / ;
U.S. Cl.
CPC ...
534557 ; 430165 ; 430191 ; 430192 ; 430193 ;
Abstract
A radiation sensitive compound prepared by reacting a phenol compound with a quinone diazide sulfonyl halide in a mixture of a solvent having a relative dielectric constant of not larger than 10 and a solvent having a relative dielectric constant of at least 15, which compound is less colored and gives a positive resist composition having a good resolution.