The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 19, 1993
Filed:
Apr. 10, 1992
Applicant:
Inventors:
Kimiharu Matsumura, Kumamoto, JP;
Hiroyuki Sakai, Koshi, JP;
Assignees:
Tokyo Electron Limited, Tokyo, JP;
Tokyo Electron Kyushu Limited, Kumamoto, JP;
Primary Examiner:
Int. Cl.
CPC ...
B05D / ;
U.S. Cl.
CPC ...
427240 ; 427294 ; 427377 ;
Abstract
Coating method and apparatus. Said coating method comprises setting pressure in a chamber higher than the vapor pressure of a solvent mixed in a liquid which is coated on the surface of a matter to be processed, and dropping and spreading the coating liquid on the surface of the matter while rotating the matter by a predetermined number of rotation.