The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 1993
Filed:
Sep. 19, 1991
Applicant:
Inventors:
Manfred Arnold, Aschaffenburg, DE;
Rainer Gegenwart, Rodermark, DE;
Sonja Noll, Frankfurt, DE;
Jochen Ritter, Laubach, DE;
Helmut Stoll, Sulzbach, DE;
Assignee:
Leybold Aktiengesellschaft, Hanau I, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
392399 ; 392395 ; 392389 ;
Abstract
A heated evaporator housing is provided at its inlet with an ultrasonic atomizer for reducing monomer to small droplets and a permeable porous body completely occupying a cross section of the housing between the inlet and the outlet. A vacuum pump and a reaction chamber for coating substrates are provided downstream of the outlet.