The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 25, 1993
Filed:
Jan. 09, 1992
Wacker-Chemitronic Gesellschaft fur Elektronik-Grundstoffe mbH, Burghausen, DE;
Abstract
The separation of thin disk-type workpieces from a stack has, as a rule, hitherto been carried out by hand. An apparatus and a corresponding method are now provided which make it possible to lift the wafer off the stack without mechanical contact, and also to convey the separated wafers to the tray and to introduce them in an automated way without damage. In this method, a stack of disk-type workpieces is introduced into a wafer magazine with a feed unit which brings the uppermost wafer of the wafer stack into the sphere of action of a fluid medium which emerges under pressure in a preferred direction from a nozzle system. A dam makes it possible to remove a single wafer. The apparatus and the method make possible separation without damage while increasing the yield. In conjunction with a conveying apparatus, an apparatus for tray filling processing lines can be built up for automatically treating disk-type workpieces without damage.