The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 1992
Filed:
Jan. 24, 1992
Applicant:
Inventors:
Andrew J Blakeney, Seekonk, MA (US);
Robert Rogler, Rehoboth, MA (US);
Medhat Toukhy, Barrington, RI (US);
David Brzozowy, Lincoln, RI (US);
Assignee:
OCG Microelectronic Materials, Inc., Cheshire, CT (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03E / ; G03C / ;
U.S. Cl.
CPC ...
430331 ; 430325 ; 430326 ;
Abstract
Described herein is a developer for alkali developable photoresists which comprises the addition of a selected fluorinated amphoteric surfactant to an aqueous basic solution.