The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 1992
Filed:
Dec. 24, 1990
Applicant:
Inventors:
Assignee:
SGS-Thomson Microelectronics S.r.L., Agrate Brianza, IT;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437 40 ; 437 29 ; 437 41 ; 148D / ;
Abstract
A process for the manufacture of power-MOS semiconductor devices achieves high cell density by the use of self-aligning techniques and photographic exposure equipment of the stepper type. The process calls for definition and formation of the source by a complementary spacer technique and metallization of the source and gate contact areas by silicides after formation of spacers on the gate wall.