The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 1992
Filed:
Dec. 05, 1990
Applicant:
Inventors:
Hiromi Harada, Hiratsuka, JP;
Toshihisa Nozawa, Yokohama, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F27B / ;
U.S. Cl.
CPC ...
219390 ; 219405 ; 219411 ; 219522 ; 392408 ; 392416 ; 432121 ; 118725 ;
Abstract
A heat-treatment furnace comprising a process tube for containing an object of treatment, a heater surrounding the process tube, and an infrared impermeable member located on the process tube side of the heater and at least one the side of an open end of the process tube through which the object of treatment is carried in and out.