The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 07, 1992

Filed:

Feb. 01, 1990
Applicant:
Inventors:

Wei-Yuan Lin, Campbell, CA (US);

Noor U Haq, Saratoga, CA (US);

Dalton Chen, Santa Clara, CA (US);

Assignee:

Ardrox Inc., La Mirada, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03C / ;
U.S. Cl.
CPC ...
430331 ; 430326 ; 430327 ; 430329 ; 134-2 ; 134-3 ; 134 38 ; 134 41 ; 134 42 ; 252162 ;
Abstract

A positive photoresist stripper composition includes a solvent system having solubility parameters which fall within a range from about 8.5 to about 15 in an amount which falls within a range from about 65% to about 98%. An amine is present in an amount which falls within a range from about 2% to about 25%. A fatty acid having 8 to 20 carbon atoms is present in an amount which falls within a range from about 0.1% to about 10% (all percents being by weight). The amount of the amine and of the fatty acid are selected to provide a pH which falls in a range from about 6 to about 9.5. Positive photoresist is stripped from a substrate by immersing the substrate in the aforementioned composition. Metal deposited on the substrate is not attached by the composition.


Find Patent Forward Citations

Lin, Wei-Yuan. (1992). Resist stripping (U.S. Patent No. 5102777). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5102777

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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