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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 5086256 B1

PDFFull Text
Date of Patent:
Feb. 04, 1992

Filed:

Nov. 20, 1989

External resonance circuit type radio frequency quadrupole accelerator

Applicant:
Inventors:

Katsumi Tokiguchi, Hitachi, JP;

Kensuke Amemiya, Katsuta, JP;

Noriyuki Sakudo, Hitachi, JP;

Takayoshi Seki, Hitachi, JP;

Assignee:

The Agency of Industrial Science and Technology, Tokyo, JP;

Attorney:

Antonelli, Terry, Stout & Kraus

Primary Examiner:

Eugene R LaRoche

Assistant Examiner:

Do Hyun Yoo

Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
31511181 ; 31511121 ; 2504 / ; 20419211 ; 20419237 ; 20429802 ; 20429804 ;
Abstract

An Mev ion implantation apparatus which does not contaminate a sample substrate with heavy metal particles. The apparatus includes an external resonance circuit type RFQ accelerator incluidng undulated quadrupole electrodes and a separate radio frequency resonance circuit for generating a radio frequency high voltage to be supplied to the electrodes. The undulated quadrupole electrodes and at least a part of metallic supports for supporting the electrodes and voltage supplying lines are provided with a surface coating of silicon, silicon doped with an impurity such as boron, phosphorus, or arsenic, or a light element having a mass number of 28 or less, such as carbon.

Find Patent Forward Citations

Tokiguchi, Katsumi. (1992). External resonance circuit type radio frequency quadrupole accelerator (U.S. Patent No. 5086256). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5086256

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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