The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 1992
Filed:
Dec. 12, 1989
Applicant:
Inventors:
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250311 ; 250306 ; 250307 ;
Abstract
A method of positioning electron-beam irradiation and a device used in such method comprising the steps of irradiating a desired portion of a specimen with an electron beam, forming an image of the electron beam which penetrates the specimen on a fluorescent screen, and positioning the electron beam irradiation to the above-mentioned specimen on the basis of the image of the specimen on the fluorescent screen obtained by scanning an electron beam over a range wider than the spot size of the electron beam on the surface of the specimen.