The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 1991
Filed:
Nov. 14, 1990
Applicant:
Inventors:
Jurgen Frosien, Ottobrunn, DE;
Rainer Spehr, Ober-Ramstadt, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ; G01T / ; G01N / ; G01B / ;
U.S. Cl.
CPC ...
250397 ; 250309 ; 250310 ;
Abstract
The invention relates to a corpuscular beam device, such as an ion beam dce or an electron beam device, in which a primary corpuscular beam is focussed by means of an objective lens onto a sample. The secondary radiation emitted at the point of impact of the primary beam is accelerated onto the central electrode of the objective lens, this electrode being coated with scintillation material, and there produces light pulses which are converted by a light-sensitive detector into electrical signals and amplified.