The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 08, 1991

Filed:

Apr. 04, 1991
Applicant:
Inventors:

William J Gallagher, Ardsley, NY (US);

Chao-Kun Hu, Somers, NY (US);

Mark A Jaso, Yorktown Heights, NY (US);

Mark B Ketchen, Hadley, MA (US);

Alan W Kleinsasser, Putnam Valley, NY (US);

Dale J Pearson, Yorktown Heights, NY (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; B44C / ; C23F / ; C03C / ;
U.S. Cl.
CPC ...
156643 ; 156645 ; 156651 ; 156653 ; 156656 ; 156657 ; 1566591 ; 156667 ; 505728 ; 505820 ;
Abstract

A method for fabricating Josephson integrated circuits and the circuit is described incorporating the steps of depositing layers of different materials to form a trilayer Josephson junction, etching to define a plurality of trilayer areas, depositing dielectric material thereover, and chemical-mechanical polishing to planarize the dielectric material down to provide a coplanar surface with the tops of the trilayer areas for subsequent interconnection. The invention overcomes the problem of poor quality Josephson junctions, low Vm's, and crevices or gaps in the upper coplanar surface between the trilayer area and the surrounding dielectric material.


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