The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 23, 1991
Filed:
Oct. 24, 1989
Kazuo Mitsui, Yamanashi, JP;
Hiroshi Suzuki, Yamanashi, JP;
Toshihiro Hosoda, Yamanashi, JP;
Toshihiko Iijima, Yamanashi, JP;
Shinji Niwa, Yamanashi, JP;
Tetsuji Watanabe, Nirasaki, JP;
Hideo Sakagawa, Kofu, JP;
Tetsuo Sato, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A probe device having a loader unit and two measuring units is disclosed. Each of the loader and measuring units is an independent unit supported by an independent casing. Each of the loader and measuring units has its exclusive slave CPU and integrated circuit members are under the control of this slave CPU to manage operations of members at the unit. The slave CPUs are connected to a master CPU, which controls the slave CPUs and which is also an independent unit, and they are connected to one another only through the master CPU. Program language is common to the master and slave CPUs and the units can be electrically connected to form an integral control system in which signals are exchanged among the units.