The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 14, 1991

Filed:

Nov. 06, 1989
Applicant:
Inventors:

Larry Rosenberg, San Jose, CA (US);

Curt H Chadwick, Los Gatos, CA (US);

Alex Brudny, San Jose, CA (US);

Assignee:

KLA Instruments Corporation, San Jose, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
A47B / ;
U.S. Cl.
CPC ...
108 50 ; 108 25 ; 297457 ;
Abstract

An instrument table having two features is disclosed. The first is a stable instrument bench that is constructed of sections of precast reinforced concrete. Each of these sections are then moisture sealed with a plastic coat or paint, then assembled using epoxy and bolts. The second element of the present invention is the replication of a precision surface on the table portion of an instrument bench. The replication of the precision surface entails the application of a bead of plastic to the selected portions of the instrument table, lowering of a jig having a portion of the underside thereof machined or ground to the selected specifications of the surface to be replicated onto the instrument table thereonto, supporting the jig a selected distance above the surface of the instrument table to push out the plastic into a pad of a thickness that is equivalent to the distance above the table at which the jig is supported, and removing the jig after the plastic is cured thus leaving behind the plastic pad that has thereon a precision surface that replicates the machined or ground surface on the underside of the jig.


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