The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 1991
Filed:
Mar. 09, 1989
Issei Imahashi, Tokyo, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A wafer transport apparatus for an ion implantation apparatus includes means for successively transferring wafers from a wafer cassette, inserting the wafers into an auxiliary vacuum chamber, transferring the wafers into a specific position within a vacuum processing chamber, transferring a wafer from that position to a position for ion implantation processing while at the same time transferring a processed wafer to a second position within the vacuum processing chamber, with the wafers being held retained during this transfer, successively transferring the processed wafers into a second auxiliary vacuum chamber, and transporting the wafers from the second auxiliary vacuum chamber to be inserted into a cassette, e.g. the cassette from which the wafers were originally removed. The wafers are supported or held retained by the transfer and transport means during the entire process, so that problems resulting from gravity feed of wafers along inclined surfaces, which arise with prior art apparatus of this type, are eliminated.