The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 1990
Filed:
Sep. 25, 1989
Josef Berger, Los Altos, CA (US);
Armand P Neukermans, Palo Alto, CA (US);
John L Vaught, Palo Alto, CA (US);
Tencor Instruments, Mountain View, CA (US);
Abstract
A method and apparatus for detecting and classifying particles on a surface in which condensation is used to enlarge particles. An apparatus of the present invention includes a heatable wick disposed over a test surface and in fluid communication with a source of volatile liquid. A zone of vapor supersaturation is thus created in which condensation on particles on the surface can occur. A light beam directed onto the surface scans the surface. Droplets are detected by means of light scattered from the droplets. In an alternate embodiment a stream of carrier gas may be provided around the wick or bubbled through a jar of volatile liquid to direct a vapor toward the test surface. In another embodiment, multiple wicks communicate with different sources of volatile liquids. In a method of the invention, mulitple scans are made with either different levels of vapor supersaturation or different vapor compositions. Comparing particles in each scan allows one to classify particles into different size ranges or chemical type.