The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 15, 1990

Filed:

Jan. 23, 1989
Applicant:
Inventor:

Toshiaki Miyokawa, Tokyo, JP;

Assignee:

Jeol Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
2504 / ; 250307 ; 250309 ; 250310 ; 250311 ; 2504 / ; 250398 ; 3133631 ; 313336 ;
Abstract

There is disclosed a field emission electron gun comprising a field emission tip, an extraction electrode for producing an electric field that extracts electrons from the tip, and an accelerating electrode for accelerating the electrons extracted by the extraction electrode. The extraction electrode is inclined to a plane perpendicular to the optical axis of the beam of the electrons and shaped like an inverted cone. The surface of the accelerating electrode which faces the extraction electrode is inclined in the same manner as the extraction electrode. A recess that faces the extraction electrode is formed in the center of the accelerating electrode. The ratio of the voltage V.sub.0 applied to the accelerating electrode to the voltage V.sub.1 applied to the extraction electrode, i.e., V.sub.0 /V.sub.1, can be varied over a wide range while maintaining the virtual source within the virtual image region.


Find Patent Forward Citations

Loading…