The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 1990
Filed:
Mar. 31, 1989
Applicant:
Inventors:
Koichi Homma, Yokohama, JP;
Fuminobu Komura, Yokohama, JP;
Tetsuo Yokoyama, Tokyo, JP;
Koichi Haruna, Yokohama, JP;
Toshihiro Furuya, Katsuta, JP;
Hiromi Kashiwabara, Kashiwa, JP;
Akira Maeda, Machida, JP;
Yutaka Takuma, Tokyo, JP;
Takashi Iizumi, Kawasaki, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06K / ;
U.S. Cl.
CPC ...
382 54 ; 250311 ; 2503 / ; 250397 ;
Abstract
An image correcting apparatus for correcting distortion appearing in an image produced by electron beam scanning in a SEM under the influence of electric, magnetic and mechanical vibrations through arithmetic operations for eliminating the distortion. Installation of electric shield, magnetic shield and vibration-damping structure is thus rendered unnecessary.