The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 1990
Filed:
Apr. 27, 1988
Masahiko Okunuki, Tokyo, JP;
Isamu Shimoda, Zama, JP;
Mamoru Miyawaki, Tokyo, JP;
Takeo Tsukamoto, Atsugi, JP;
Akira Suzuki, Yokohama, JP;
Tetsuya Kaneko, Yokohama, JP;
Toshihiko Takeda, Tokyo, JP;
Mitsuaki Seki, Machida, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A charged-particle beam pattern drawing apparatus for drawing, by use of a charged-particle beam, a desired circuit pattern on a workpiece having a surface coated with a sensitive material, is disclosed. The apparatus includes a data source having data stored therein related to the circuit pattern, a plurality of charged-particle beam producing sources for emitting charged-particle beams toward the workpiece, in accordance with the data supplied thereto from the data source, and a plurality of deflecting electrodes each being provided for a corresponding one of the charged-particle beam producing source, for deflecting the charged-particle beams from the charged-particle beam producing sources independently of each other and in accordance with the data supplied from the data source.