The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 1990
Filed:
Mar. 25, 1988
Applicant:
Inventors:
Masashi Iwatsuki, Tokyo, JP;
Kimio Ohi, Tokyo, JP;
Kazuma Suzuki, Tokyo, JP;
Kiyoshi Miyashita, Tokyo, JP;
Assignee:
Jeol Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250306 ; 250307 ;
Abstract
A tip-scanning mechanism for use in a scanning tunneling microscope uses three drivers for driving a probe tip in three perpendicular directions. The drivers each consist of a piezoelectric element. In accordance with the invention, these three drivers are each shaped into a sheet, and the three sheets are stacked on top of each other. Two of the three drivers produce strains parallel to both faces of the drivers when a voltage is applied across the faces of each driver. Thus, rapid scans can be made without producing distortion.