The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 1989
Filed:
Dec. 03, 1987
Valerie A Liudzius, Simi Valley, CA (US);
Ralph M Weisner, Canoga Park, CA (US);
Takashi Kamiharako, Tokyo, JP;
Iwami Uramoto, Tokyo, JP;
View Engineering, Inc., Simi Valley, CA (US);
Kaijo Denki Co., Ltd., Tokyo, JP;
Abstract
A semiconductor device inspection system capable of objectively accomplishing visual image inspection of a semiconductor device and minimizing error in the inspection, to thereby effectively carry out the inspection with high accuracy and at high speed. The system includes a low magnification image pickup mechanism which consists of a plurality of low magnification image pickup units each carrying out low magnification image pickup of a semiconductor device to generate an image signal. The system also includes a signal processing system for processing the image signal to judge the correctness of the semiconductor device. In the image pickup units, their light receptors are each arranged in parallel to an inspected surface of the semiconductor device and their central axes intersect together on the inspected surface. The system may also include a high magnification image pickup unit consisting of a high magnification image pickup mechanism and a light-permeable element retractably positioned between the unit and a semiconductor device to be inspected.