The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 29, 1989
Filed:
Sep. 01, 1988
Hee-June Choi, Fremont, CA (US);
Francois J Henley, San Jose, CA (US);
Maurice R Barr, Saratoga, CA (US);
Photon Dynamics, Inc., San Jose, CA (US);
Abstract
A high speed test system for performing tests on various electrical devices including integrated circuits and semiconductor wafers at device operating speeds in the Gigahertz range. The test system including a test head having a test platform for receiving an adapter board that holds the device under test. The test platform is exposed on one side of the test head to facilitate readily changing the tested devices and easy coupling with conventional wafer prober machines. A plurality of pin driver boards are positioned radially about the test platform to minimize the distance between the device under test and the pin driver boards. Electrical signals presented at specific locations on the device under test are measured in response to the inputted signals form the pin drivers using an electro-optic sensor preferably located central of the pin driver boards and within 1.0 cm of the device under test to minimize pin capacitance. A cooling system is provided to maintain the pin drivers at a substantially constant temperature during operation to minimize pin driver timing drift. An optical system directs light towards the electro-optic sensor through an optical path located centrally of the pin driver boards.