The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 22, 1989
Filed:
May. 03, 1988
Applicant:
Inventors:
Gabriel G Barna, Richardson, TX (US);
Demetre J Economou, Houston, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
B44C / ; B05D / ; H01L / ; C03C / ;
U.S. Cl.
CPC ...
156626 ; 118 501 ; 118620 ; 118712 ; 156643 ; 156646 ; 156345 ; 20419213 ; 20419233 ; 204298 ; 427-8 ; 427 38 ;
Abstract
An apparatus and method for measuring the concentration profile of an active species across the surface of a semiconductor slice in a plasma reactor is disclosed that permits uniformity of etch and deposition across the surface of the semiconductor slice.