The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 1989
Filed:
Sep. 04, 1987
Applicant:
Inventors:
William R Brunsvold, Poughkeepsie, NY (US);
Willard E Conley, Cornwall, NY (US);
Scott L Jacobs, Apex, NC (US);
George L Mack, Pleasant Valley, NY (US);
David P Merritt, Cold Spring, NY (US);
Ann M Uptmor, Wappingers Falls, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03C / ; G03C / ;
U.S. Cl.
CPC ...
430271 ; 430313 ; 430311 ; 430314 ; 430323 ; 430324 ; 528351 ; 524 84 ; 524 93 ; 524606 ; 524600 ; 524110 ;
Abstract
A composition for use in a process for the deposition of patterned thin metal films on integrated circuit substrates, the composition comprising an admixture of a thermoplastic polyimide resin and a coumarin dye dissolved in a substituted phenol solvent. Optionally a polar solvent having a boiling point greater than 160.degree. C. and a low boiling organic compound (70.degree.-150.degree. C.) may be incorporated in the composition.