The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 1989
Filed:
May. 11, 1987
Applicant:
Inventors:
Teodoro E Brat, Reynoldsburg, OH (US);
Charles E Wickersham, Columbus, OH (US);
Assignee:
Tosoh SMD, Inc., Grove City, OH (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ; C22C / ; C01B / ; C04B / ;
U.S. Cl.
CPC ...
20419215 ; 20419221 ; 204298 ; 419 13 ; 419 49 ; 423411 ; 501 96 ;
Abstract
The present invention provides a sputter target for the deposition of titanium nitride films. The sputter target has a target face comprising titanium nitride having a density of at least 90% of the theoretical density of 100% pure titanium nitride. The sputter target is prepared by subjecting titanium nitride powder to hot isostatic pressure.