The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 1987
Filed:
May. 02, 1986
Shinji Sekiya, Tokyo, JP;
Disco Abrasive Systems, Ltd., Tokyo, JP;
Abstract
A precision device including a holding mechanism for holding an object and a supporting mechanism for supporting an operating element, one of which is movable in a predetermined direction. The precision device includes a detecting device for detecting the amount of movement of one of the holding holding and supporting mechanisms in the predetermined direction, and the detecting device includes a scale formed of a material having a coefficient of linear expansion, in a temperature range of -20.degree. to 100.degree. C., of not more than 10.times.10.sup.-7 /.degree.C. as an absolute value. The precision device further includes a detecting device for detecting the amount of thermal expansion of at least a part of the supporting mechanism in the predetermined direction.