The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 1987
Filed:
Apr. 21, 1986
Applicant:
Inventors:
Stanford R Ovshinsky, Bloomfield Hills, MI (US);
David D Allred, Troy, MI (US);
Lee Walter, Bloomfield Hills, MI (US);
Stephen J Hudgens, Southfield, MI (US);
Assignee:
Energy Conversion Devices, Inc., Troy, MI (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
427 39 ; 427 86 ;
Abstract
A method of depositing a semiconductor alloy film onto a substrate by activating at least one group of free radicals and incorporating desired ones of the activated group into the film.